QUARTZ GLASS CRUCIBLE FOR PULLING UP SILICON SINGLE CRYSTAL AND PRODUCING METHOD THEREOF

摘要

PROBLEM TO BE SOLVED: To provide a quartz glass crucible for pulling up silicon single crystal and a producing method thereof which prevents the roughening of inside surface of silicon glass crucible during a silicon single crystal pulling up process, causes no dislocation and provides the high monocrystallinity. SOLUTION: In this quartz glass crucible for pulling up single crystal and producing method thereof, the concentration of Ca in the region of 100μm from the inside surface is made to be 2.0 ppm or less.