发明名称 SEMICONDUCTOR DEVICE AND METHOD FOR FABRICATING THE SAME
摘要 Provided are a semiconductor device and a method for fabricating the same. The semiconductor device includes an active fin which protrudes from a substrate and is extended in a direction, a first device isolation layer which is extended from a side of the active fin to intersect with the active fin, a normal gate which is extended from the active fin to intersect with the active fin, a first dummy gate which is extended in parallel to the first device isolation layer on the first device isolation layer and has an undercut on a lower part thereof, and a first filler which is formed on the first device isolation layer and is filled in the undercut of the first dummy gate. So, the reliability of products can be improved.
申请公布号 KR20160077989(A) 申请公布日期 2016.07.04
申请号 KR20140188584 申请日期 2014.12.24
申请人 SAMSUNG ELECTRONICS CO., LTD. 发明人 YOU, JUNG GUN;PARK, YOUNG JOON;HA, JI YONG
分类号 H01L29/78 主分类号 H01L29/78
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