| 摘要 |
PROBLEM TO BE SOLVED: To actively prevent entry of a vaporized processing liquid or vapor into the exposure side by eliminating the need for clearance for driving a shutter plate provided so as to be freely opened/closed, in a shutter device that blocks/ unblocks a communicating hole between a first chamber on the exposure side and a second chamber on the processing liquid tank side. SOLUTION: A shutter device 15 is composed of the shutter plate 31 which is pivotally supported at a base 30, a torsion spring which moves and presses the shutter plate 31 into a closing position, and an electromagnetic solenoid which drives the shutter plate 31 to an opening position. The shutter plate is integrally formed from a metal plate member 31 and an elastic member 33. When the shutter plate is in the closing position, the elastic member tightly closes the entire periphery of the opening.
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