发明名称 A method of producing a semiconductor layer on a substrate
摘要 A method of producing a semiconductor layer onto a semiconductor substrate, comprising the steps of : Providing a first semiconductor substrate (1), Providing a second semiconductor substrate (5), Producing a porous layer (6,7,8) on top of said second semiconductor substrate, said layer having a porosity profile, Bringing said porous layer of said second substrate (5) into contact with said first substrate (1), so as to form a bond between said two substrates, Performing a thermal annealing step, Lifting off of said second substrate, leaving a layer of said second substrate's semiconductor material attached to said first substrate. <IMAGE>
申请公布号 EP1217663(A1) 申请公布日期 2002.06.26
申请号 EP20000870312 申请日期 2000.12.21
申请人 INTERUNIVERSITAIR MICRO-ELEKTRONICA CENTRUM;UMICORE S.A. 发明人 POORTMANS, JEF;FLAMAND, GIOVANNI;BILYALOV, RENAT
分类号 H01L21/18;H01L31/18 主分类号 H01L21/18
代理机构 代理人
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