| 发明名称 | Reinforcement ring for carrier head | ||
| 摘要 | A reinforcement ring is for placement in a carrier head to abut an inner surface of a perimeter portion of a flexible membrane. The reinforcement ring includes a substantially vertical cylindrical portion, a first flange projecting inwardly from the bottom of the cylindrical portion, and a second flange projecting outwardly from a bottom of the cylindrical portion. The second flange projects downwardly at a non-zero angle from vertical. | ||
| 申请公布号 | US9381613(B2) | 申请公布日期 | 2016.07.05 |
| 申请号 | US201414163914 | 申请日期 | 2014.01.24 |
| 申请人 | Applied Materials, Inc. | 发明人 | Leighton Jamie Stuart;Meyer Stacy;Paik Young J. |
| 分类号 | B24B37/30;B24B41/06 | 主分类号 | B24B37/30 |
| 代理机构 | Fish & Richardson P.C. | 代理人 | Fish & Richardson P.C. |
| 主权项 | 1. A reinforcement ring for placement in a carrier head to abut an inner surface of a perimeter portion of a flexible membrane, comprising: a substantially vertical cylindrical portion; a first flange projecting inwardly from a bottom of the cylindrical portion, the first flange projecting downwardly at a non-zero angle from vertical such that a bottom of the first flange at a tip distal from the vertical cylindrical portion is lower than a bottom of the first flange at a proximal end where the first flange connects to the vertical cylindrical portion; and a second flange projecting outwardly from a bottom of the cylindrical portion. | ||
| 地址 | Santa Clara CA US | ||