| 摘要 |
PROBLEM TO BE SOLVED: To provide a coating method capable of applying a coating liquid to the surface of a substrate thinly and uniformly in a short time. SOLUTION: A slit nozzle 6 faces one end of a glass substrate W from the upper side. While a coating liquid 10 is sprayed from the slit nozzle 6, the slit nozzle 6 is moved parallel to the glass substrate W, thereby roughly applying the coating liquid to almost whole surface of the glass substrate W. Subsequently, an inner cup 2 is rotated to rotate the glass substrate W concurrently, which uniformly disperses the coating liquid coated on the surface. |
