摘要 |
<p>A semiconductor device comprising a silicon substrate is provided with semiconductor elements on a first side, a metallization with connection pads for external contact, and a passivation layer which leaves the connection pads of the metallization exposed. The integrated circuit thus formed is also provided with a ceramic security coating having a matrix of monoaluminium phosphate which also leaves the connection pads of the metallization exposed. The protective layer can be deposited so as to have a thickness in the range from 2 to 10 mum, and hence is suitable for protecting integrated circuits used in smart cards. As a result, the information stored therein is not accessible.</p> |