DOUBLE-HEAD SURFACE GRINDING DEVICE WITH WASHING DEVICE FOR GRINDING WHEEL AND WASHING METHOD FOR THE GRINDING WHEEL

摘要

PROBLEM TO BE SOLVED: To prevent the lowering of grinding efficiency and precision by preventing the deterioration in cutting sharpness of a rotary grinding wheel caused by loading generated in the rotary grinding wheel and prevent the warp etc., of a wafer caused by the lowering of the grinding precision by eliminating the difference in the cutting sharpness in upper/lower rotary grinding wheels. SOLUTION: This double-head surface grinding device is provided with the lower rotary grinding wheel 15 and an upper rotary grinding wheel 16. The grinding operation surface of the grinding portion 15A in the lower rotary grinding wheel 15 and the grinding operation surface of a grinding portion 16A in the upper rotary grinding wheel 16 are parallel to each other. This grinding devise is provided with a nozzle 60 for washing the grinding wheel portions 15A and 16A by spraying high-pressure washing liquid after completing the grinding work.