发明名称 |
Cooling system for cathodic arc cathodes |
摘要 |
An apparatus for cathodic arc coating is provided. The apparatus includes: a vacuum chamber which includes an anode; a power supply; and a cathode target connected to the power supply. The cathode target has a channeled back surface for improving heat transfer from the cathode target. In the preferred embodiment, the cathode target also includes a conductor segment connecting the cathode target to the power supply of the cathodic arc coating apparatus for conducting the increased current capacity of the cathode target and a cooling block in contact with the cathode target to further improve the heat transfer from the cathode target.
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申请公布号 |
US6409898(B1) |
申请公布日期 |
2002.06.25 |
申请号 |
US20010681386 |
申请日期 |
2001.03.28 |
申请人 |
GENERAL ELECTRIC COMPANY |
发明人 |
WEAVER SCOTT ANDREW;LIPKIN DON MARK;CORDERMAN REED ROEDER |
分类号 |
H01J37/32;(IPC1-7):C25B11/02;C23C14/34 |
主分类号 |
H01J37/32 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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