发明名称 Nitride semiconductor laser and method of fabricating the same
摘要 A method for fabricating a nitride-semiconductor laser constituted by superimposing a plurality of crystal layers respectively made of a group III nitride semiconductor (AlxGa1-x)1-YInyN (0<=x<=1, 0<=y<=1) on a cleavable or parting substrate in order comprises the crystal layer forming step of forming a plurality of crystal layers on a cleavable or parting substrate, the step of applying a light beam from the substrate side toward the interface between the substrate and the crystal layers and thereby forming the decomposed-matter area of the nitride semiconductor, and the step of cleaving or parting the substrate along a straight line intersecting with the decomposed-matter area and thereby forming a cleavage plane.
申请公布号 US6411636(B1) 申请公布日期 2002.06.25
申请号 US19990468082 申请日期 1999.12.21
申请人 PIONEER CORPORATION 发明人 OTA HIROYUKI;CHIKUMA KIYOFUMI
分类号 H01S5/00;H01S5/02;H01S5/323;(IPC1-7):H01S5/00 主分类号 H01S5/00
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