发明名称 |
Rotational mask scanning exposure method and apparatus |
摘要 |
A method and rotational mask scanning apparatus for exposing a plurality of images on a workpiece, include a rotatable mask having a pattern of image segments thereon, an optical system for projecting the image segments onto the workpiece, and a device for at least one of rotating the mask and for moving the workpiece so as to continuously expose a plurality of regions on the workpiece with the pattern of image segments.
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申请公布号 |
US6411362(B2) |
申请公布日期 |
2002.06.25 |
申请号 |
US19990225072 |
申请日期 |
1999.01.04 |
申请人 |
INTERNATIONAL BUSINESS MACHINES CORPORATION |
发明人 |
ANDERSON BRENT ALAN;COFFEY MICHAEL |
分类号 |
G03F1/14;G03F7/20;(IPC1-7):G03B27/48;G03B27/42;G03B27/50 |
主分类号 |
G03F1/14 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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