| 摘要 |
A surface contamination measuring apparatus has a suction means for sucking in air from the proximity of an object under measurement, a measurement section for measuring the amount and composition of sucked-in particles, a discharging means for discharging a fluid onto the surface of the object under measurement, a sampling member brought into proximity to surface of the object under measurement, and a blocking member made of a flexible member at the periphery of the sampling member, and can efficiently capture particles that has become attached to the surface under measurement.
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