发明名称 Apparatuses for forming layers
摘要 In one aspect, the invention includes a method of forming a layer of particulates on a substrate, comprising: a) fastening a first substrate to a second substrate; b) while the first substrate is fastened to the second substrate, submerging at least a portion of the first substrate in a liquid; c) suspending particulates on an upper surface of the liquid; d) moving the submerged first substrate relative to the suspended particulates to form a layer of the particulates supported on the first substrate; and e) removing the first substrate from the second substrate. In another aspect, the invention includes a layer forming apparatus, comprising: a) a vessel configured to retain a liquid; b) a pusher bar joined to the vessel and configured to compress particulates on an upper surface of the liquid; c) a conveyor which enters and exits the vessel, the conveyor being configured to removably retain substrates and to transport such substrates through the vessel, the conveyor having a front surface that faces the pusher bar and a back surface in opposing orientation relative to the front surface; and d) the vessel, conveyor and pusher bar being configured to form a layer of the particulates on substrates as the substrates are transported through the vessel by the conveyor.
申请公布号 US6409835(B1) 申请公布日期 2002.06.25
申请号 US19990396388 申请日期 1999.09.15
申请人 MICRON TECHNOLOGY, INC. 发明人 ALWAN JAMES J.
分类号 B05D1/20;H01J9/02;(IPC1-7):B05C3/00 主分类号 B05D1/20
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