| 摘要 |
PROBLEM TO BE SOLVED: To provide a spin coater for uniformly coating the surface of a disk with a chemical liquid by eliminating such a problem that the fine particles of the chemical liquid generated when the excess chemical liquid scattered from the outer periphery of the disk collides with a cup are whirled up in air to adhere to the surface of the disk during coating to generate defectiveness and uniforming the coating film on the whole of the disk to realize the enhancement of the thickness accuracy of the coating film and the reduction of cost. SOLUTION: The cup of the spin coater is rotated in the same direction as the rotary direction of the disk. The number of rotations of the disk is set so that the speed in the tangential direction of the side wall of the cup becomes almost equal to the component of velocity of the scattered chemical liquid in the same direction as the tangential direction of the side wall of the cup at a point where the scattered chemical liquid from the outer periphery of the disk arrives at the side wall of the cup. Chemical liquid stoppers are provided to the upper and lower parts of the side wall of the cup. |
