| 摘要 |
PROBLEM TO BE SOLVED: To clean a work (e.g. semiconductor pellets) while standing in line. SOLUTION: Cleaning jigs 5a, 5b are detachably attached to timing belts 3a, 3b, respectively. Along the moving routes of cleaning jigs 5a, 5b containing a work W standing in line, cleaning liquid jetting means 6a, 6b, cleaning liquid blow-off means 7a, 7b, and dry-gas jetting means 8a, 8b are arranged, respectively. |
