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发明名称
Ion beam sputtering apparatus
摘要
申请公布号
AU2092502(A)
申请公布日期
2002.06.24
申请号
AU20020020925
申请日期
2001.12.12
申请人
NORDIKO LIMITED
发明人
MERVYN HOWARD DAVIS
分类号
C23C14/34;C23C14/46
主分类号
C23C14/34
代理机构
代理人
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