SCAN MOTOR INTERLOCK STRUCTURE OF ION IMPLANTER

摘要

PURPOSE: A scan motor interlock of an ion implanter is provided to reduce a partial implanting problem occurring in a motor fail by improving its structure. CONSTITUTION: A scan motor interlock of an ion implanter comprises a scan motor(2) for supplying a motive power so as to move a wafer to a defined direction, a scan motor interface part(21) for supplying an electric source to the scan motor(2) and for receiving a level value of an output current when driving the scan motor(2), a monitoring part(11) for controlling a scan motor(2) through the scan motor interface part(21), for setting up an interlock when occurring a malfunction after comparing the level value of the output current supplied from the scan motor interface part(21) with a reference value previously installed and for displaying an error signal through a display device, thereby preventing an implanting problem.