| 摘要 |
PROBLEM TO BE SOLVED: To perform long-term operation, and hence remarkably improve working efficiency by providing a substrate retention member that has superior stiffness as compared with metal, does not give any thermal distortion to a substrate, and is lighter than ceramics. SOLUTION: This substrate retention member is composed by an Si-SiC composite material where the content of SiC is 40 to 80 volume %. |
