| 摘要 |
PROBLEM TO BE SOLVED: To provide a plasma treatment system which can excite a high-density, uniform, and high-frequency plasma in a treating vessel even when the vessel has a large size to treat an object to be treated having a relatively large area. SOLUTION: This plasma treatment system comprises the treating vessel 2 made of a conductive material, an exhaust pump which is used to exhaust the gas in the vessel 2, and a gas supplying means which introduces the gas to the vessel 2. The treatment system also comprises a placing base which is set up in the vessel 2 to place the object to be treated on the base and a plurality of high-frequency antennas 73 which are formed in planar spiral coil- like shapes on the outside of a treatment chamber through an insulating material 5. |
