METHOD OF FORMING INORGANIC SOLID ELECTROLYTE THIN MEMBRANE

摘要

PURPOSE: To provide a method capable of manufacturing an inorganic solid electrolyte thin membrane with relatively high ion conductivity. CONSTITUTION: Thin membrane 2 formed of an inorganic solid electrolyte is formed on a heated base material 1 by vapor-phase growth method. This provides the thin membrane with higher ion conductivity than if a thin membrane is formed on an unheated base material. After the thin membrane formed of the inorganic solid electrolyte is formed on the base material 1 held at room temperature or below 40°C, the thin membrane 2 formed of the inorganic solid electrolyte is heated to increase its ion conductivity.