发明名称 APPARATUS AND METHOD FOR MANUFACTURING CRYSTALLINE SHEET
摘要 <p>PROBLEM TO BE SOLVED: To provide an apparatus and method for manufacturing a crystalline sheet by dipping its cooling body into a melted liquid, wherein its crucible is miniaturized and the angles whereat its cooling body is infiltrated/pulled-up into/from the melted liquid can be optimized. SOLUTION: A cooling body 30 is positioned by moving it horizontally, and it can be moved vertically and rotated about a horizontal rotational axis. Thereby, the volume of a crucible 23 is reduced, in comparison with the conventional crystalline-sheet manufacturing apparatuses as to eliminate the waste of Si material. Also, the angles whereat the cooling body is infiltrated/pulled-up properly into/from the surface of a melted liquid, can be adjusted to make the quality of the crystalline sheet improvable and reducible its production cost by a large amount.</p>
申请公布号 JP2002175996(A) 申请公布日期 2002.06.21
申请号 JP20000369665 申请日期 2000.12.05
申请人 SHARP CORP 发明人 YAMASHITA ZENJIRO;YANO KOZABURO
分类号 C01B33/02;C30B11/04;C30B29/06;H01L21/208;H01L31/04;(IPC1-7):H01L21/208 主分类号 C01B33/02
代理机构 代理人
主权项
地址