| 摘要 |
<p>PROBLEM TO BE SOLVED: To provide an apparatus for laser processing capable of simply controlling a pulse shape of a laser beam and enhancing stability of a laser output. SOLUTION: A trigger signal is output from a control computer 60 to respective solid state laser units 21 to 24 at suitable timing, and laser beams L11 to L22 are emitted from the respective units 21 to 24 at a suitable time difference and polarizing surfaces. The respective beams L11 to L22 are coupled by a coupling optical system 30 to become two sets of the beams L1 and L2 slightly separately advanced in parallel. Both the beams L1 and L2 are enlarged in a beam diameter as retaining as a parallel luminous flux via a telescopic optical system 40, and spatially superposed. The beams L1 and L2 fed through the system 40 are disassembled into secondary light sources of 6×6 by a homogenizer 50, and superposed on a processing surface IS to be incident.</p> |
