| 摘要 |
<p>PROBLEM TO BE SOLVED: To accurately and efficiently control a laser output from a laser oscillator to make an illuminating temperature distribution in a longitudinal direction by a plurality of parallel illuminating beams uniform in a method and an apparatus for measuring a laser power used for a laser heat treating unit for illuminating a plurality of laser beams to a material to be illuminated such as, for example a surface of a semiconductor film. SOLUTION: When the laser power of the laser heat treating unit for illuminating the surface of the material to be illuminated with the plurality of laser beams via a corresponding laser optical system from the plurality of the laser oscillators, an output of the laser beam is measured at each laser beam optical path between the laser optical system and the surface of the semiconductor film. Particularly, the laser beam of the total reflection or partial reflection is measured by a power meter by a method for directly inserting the power meter to each optical path or inserting the total reflection mirror for reflecting the laser beam to each optical path or the partial reflection mirror, and the oscillator output is controlled by the measured data.</p> |
