ROLL COATER TYPE CONTINUOUS SPUTTERING APPARATUS

摘要

PROBLEM TO BE SOLVED: To provide a roll coater type continuous sputtering apparatus capable of suppressing any rise of partial pressure of water in a film deposition chamber. SOLUTION: This roll coater type continuous sputtering apparatus comprising two chambers, i.e., a roll chamber having a plurality of rolls for uncoiling and coiling a web and a film deposition chamber for performing sputtering further comprises a device for heating the web and a device for adsorbing moisture generated from the web while the web enters the film deposition chamber from an uncoiling roll in the roll chamber.