| 摘要 |
PROBLEM TO BE SOLVED: To enable measuring of an observation image or a Raman spectrum of a film infinitesimal part in-situ in a laser annealing crystallizing step of an amorphous film. SOLUTION: A laser annealing crystallization in-situ analyzing apparatus perforates a hole at an object, applies an excimer laser beam through the hole to the film, simultaneously guides a reflected light or a Raman light to a spectroscope, a detector via the objective, and observes a sample state.
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