发明名称 WORK TREATING TANK
摘要 PROBLEM TO BE SOLVED: To prevent external heat radiation of a heat from a treating liquid through a work treating tank in the tank for dipping and treating the work in the high-temperature treating liquid. SOLUTION: The work treating tank 10 dips the work 11 in the heated high-temperature treating liquid 12 and treats the work. The tank 10 comprises an inner tank 13 for housing the liquid 12 in an overflowing state, a recovery tank 20 installed to surround an outer periphery of the upper end of the tank 13 to receive and recover the overflowing liquid 12, and an outer tank 21 continuously provided at a lower end of the tank 20 and surrounding the side face and the bottom of the tank 13, and a heat insulator 22 interposed between the tank 21 and the tank 13.
申请公布号 JP2002176019(A) 申请公布日期 2002.06.21
申请号 JP20000370411 申请日期 2000.12.05
申请人 SES CO LTD 发明人 MITSUMUNE NAOFUMI;TSUCHIKURA YOSHIKAZU
分类号 B08B3/04;B08B3/10;H01L21/304;(IPC1-7):H01L21/304 主分类号 B08B3/04
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