| 摘要 |
PROBLEM TO BE SOLVED: To provide a tiltable cylinder device capable of preventing the generation of abnormal sound and the damage of a diaphragm even when first and second diaphragms coming close thereto, in a cylinder device wherein a piston element is positioned in a cylinder body, a first pressure chamber is divided by the first diaphragm supported by the cylinder body at a peripheral portion and united to the piston element at a center portion, a second pressure chamber is divided by the second and a third diaphragms supported by the cylinder body at peripheral portions and united to the piston element at center portions, and the piston element is tiltably moved forward/backward to the cylinder body by sucking/discharging pressure fluid to/from the first and second pressure chambers. SOLUTION: In this tiltable cylinder device, a low frictional sheet is interposed between the first and second diaphragms.
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