| 摘要 |
<p>PROBLEM TO BE SOLVED: To provide a chuck plate cooler for inspection of semiconductor's electric continuity, which can cool a chuck plate to a superlow temperature of about -80 deg.C thereby enabling the manufacture cost to be lowered, and also can be downsized, and is energy-saving thereby enabling the running cost to be lowered. SOLUTION: This is a chuck plate cooler comprising a freezing unit 20 where first and second freezing circuits 21 and 22 are connected in series, and a chuck plate 5 for inspection of semiconductor's electric continuity which is directly cooled by the refrigerant supplied from the second freezing circuit 22 of the above freezing unit 20.</p> |
