ELEMENT FOR CONVERTING FLUID PRESSURE INTO OPTICAL CHARACTERISTICS, AND MANUFACTURING METHOD OF THE ELEMENT

摘要

PROBLEM TO BE SOLVED: To measure pressure in the small channel of a microfluid element by integrating the fine channel and a pressure detecting section. SOLUTION: In the element for converting fluid pressure to optical characteristics, two plates where at least one of them is transparent are laminated, a diffraction grating and the channel are provided at the junction interface so that both of them communicate with each other, and the deformation of the diffraction grating due to changes in the inner pressure of the channel is taken out, as a change in the optical characteristics of the diffraction grating.