发明名称 METHOD FOR PURIFYING MOLTEN METAL SILICON
摘要 <p>PROBLEM TO BE SOLVED: To provide a method for purifying the molten metal silicon industrially in safety. SOLUTION: An inert gas containing steam of x volume % (x>3) is blown into the molten metal silicon 10 in a treating tank as a processing gas at the flow rate of A l/minute and the inert gas is also blown onto the surface of the silicon 10 as a diluting gas at the flow rate of B l/minute at the same time so that parameters x, A and B satisfy xA/(A+B)<3. When the processing gas contains further hydrogen of y volume %, the processing gas and the diluting gas are blown so that the parameters satisfy (x+y)>3 and (x+y)A/(A+ B)<3.</p>
申请公布号 JP2002173311(A) 申请公布日期 2002.06.21
申请号 JP20000369845 申请日期 2000.12.05
申请人 SHARP CORP 发明人 OTSUKA YOSHITATSU;FUKUYAMA TOSHIAKI
分类号 C01B33/037;H01L31/04;(IPC1-7):C01B33/037 主分类号 C01B33/037
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