发明名称 |
METHOD FOR PURIFYING MOLTEN METAL SILICON |
摘要 |
<p>PROBLEM TO BE SOLVED: To provide a method for purifying the molten metal silicon industrially in safety. SOLUTION: An inert gas containing steam of x volume % (x>3) is blown into the molten metal silicon 10 in a treating tank as a processing gas at the flow rate of A l/minute and the inert gas is also blown onto the surface of the silicon 10 as a diluting gas at the flow rate of B l/minute at the same time so that parameters x, A and B satisfy xA/(A+B)<3. When the processing gas contains further hydrogen of y volume %, the processing gas and the diluting gas are blown so that the parameters satisfy (x+y)>3 and (x+y)A/(A+ B)<3.</p> |
申请公布号 |
JP2002173311(A) |
申请公布日期 |
2002.06.21 |
申请号 |
JP20000369845 |
申请日期 |
2000.12.05 |
申请人 |
SHARP CORP |
发明人 |
OTSUKA YOSHITATSU;FUKUYAMA TOSHIAKI |
分类号 |
C01B33/037;H01L31/04;(IPC1-7):C01B33/037 |
主分类号 |
C01B33/037 |
代理机构 |
|
代理人 |
|
主权项 |
|
地址 |
|