APPARATUS FOR CLEANING CHUCK

摘要

PURPOSE: An apparatus for cleaning a chuck is provided to effectively eliminate fine particles existing on the surface of the chuck and to shorten an interval of eliminating the particles, by installing a plurality of absorbing holes in a body of the cleaning apparatus and by extending the area of the cleaning apparatus. CONSTITUTION: The plurality of absorbing holes(104) are installed on the bottom surface of the body(102) at substantially regular intervals. A vacuum hose connecting unit(202) is installed on the top surface or side surface of the body. A vacuum hose connected to a vacuum pump for supplying absorbing force is connected to the vacuum hose connecting unit. A flow path(108) connects the plurality of absorbing holes with the vacuum hose connecting unit, installed inside the body.