发明名称 |
Method of fabricating optical aperture and method of fabricating probe for near field light device |
摘要 |
The problem of the invention is to provide a method of forming an optical aperture constituting a source of generating and detecting near field light. Hence, according to a method of fabricating an optical aperture of the invention, a face of a pushing body is made to be opposed to an object for aperture formation having a tip of a conical or a pyramidal shape formed at a substrate, a stopper arranged at a vicinity of the tip and a optical shielding film formed at least above the tip to cover at least a portion of the stopper and the tip and the pushing body is pushed to the object for aperture formation by force having a component directed to the tip to thereby form the optical aperture at the front end of the tip.
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申请公布号 |
US2002075569(A1) |
申请公布日期 |
2002.06.20 |
申请号 |
US20010997484 |
申请日期 |
2001.11.21 |
申请人 |
OUMI MANABU;ICHIHARA SUSUMU;KATO KENJI;MITSUOKA YASUYUKI;NIWA TAKASHI;KASAMA NOBUYUKI;MAEDA HIDETAKA;SHINOHARA YOKO |
发明人 |
OUMI MANABU;ICHIHARA SUSUMU;KATO KENJI;MITSUOKA YASUYUKI;NIWA TAKASHI;KASAMA NOBUYUKI;MAEDA HIDETAKA;SHINOHARA YOKO |
分类号 |
G01Q60/22;(IPC1-7):G02B3/00;G02B7/00;G02B9/00 |
主分类号 |
G01Q60/22 |
代理机构 |
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主权项 |
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地址 |
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