发明名称 Method of fabricating optical aperture and method of fabricating probe for near field light device
摘要 The problem of the invention is to provide a method of forming an optical aperture constituting a source of generating and detecting near field light. Hence, according to a method of fabricating an optical aperture of the invention, a face of a pushing body is made to be opposed to an object for aperture formation having a tip of a conical or a pyramidal shape formed at a substrate, a stopper arranged at a vicinity of the tip and a optical shielding film formed at least above the tip to cover at least a portion of the stopper and the tip and the pushing body is pushed to the object for aperture formation by force having a component directed to the tip to thereby form the optical aperture at the front end of the tip.
申请公布号 US2002075569(A1) 申请公布日期 2002.06.20
申请号 US20010997484 申请日期 2001.11.21
申请人 OUMI MANABU;ICHIHARA SUSUMU;KATO KENJI;MITSUOKA YASUYUKI;NIWA TAKASHI;KASAMA NOBUYUKI;MAEDA HIDETAKA;SHINOHARA YOKO 发明人 OUMI MANABU;ICHIHARA SUSUMU;KATO KENJI;MITSUOKA YASUYUKI;NIWA TAKASHI;KASAMA NOBUYUKI;MAEDA HIDETAKA;SHINOHARA YOKO
分类号 G01Q60/22;(IPC1-7):G02B3/00;G02B7/00;G02B9/00 主分类号 G01Q60/22
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