发明名称 STRUCTURE OF APPARATUS FOR IGNITING SINGLE CRYSTALLINE SEMICONDUCTOR BRIDGE AND FABRICATING METHOD THEREOF
摘要 PURPOSE: A method for fabricating an apparatus for igniting a single crystalline semiconductor bridge is provided to prevent an accident caused by explosion of a detonator, by guaranteeing excellent stability as compared with an igniter using a conventional platinum heat wire. CONSTITUTION: Impurities are directly implanted into a silicon wafer substrate(3) to form a PN junction of a predetermined thickness. Aluminum as an electrode material suitable for an electrode pattern is applied on the PN junction. A photoresist material is applied on a pattern having a type of a last igniting apparatus. The junction is etched in an etch solution through an electrochemical etch process, and the photoresist material is eliminated.
申请公布号 KR20020045786(A) 申请公布日期 2002.06.20
申请号 KR20000075182 申请日期 2000.12.11
申请人 PARK, CHONG OOK 发明人 PARK, CHONG OOK
分类号 H01L21/82;(IPC1-7):H01L21/82 主分类号 H01L21/82
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