| 摘要 |
PURPOSE: A chiller for a semiconductor process is provided to improve the rate of operation of equipment and to guarantee stability of the equipment, by preventing the waste of coolant and by making the coolant of a predetermined quantity or more heated by a heater. CONSTITUTION: An isolation plate is installed at a predetermined height of a coolant tank(116) so that a cooling bath(120) is installed in the upper portion of the coolant tank and a heating bath(122) is installed in the lower portion of the coolant tank. A cooler is installed inside the cooling bath of the coolant tank so that circulated coolant is cooled and exhausted to the inside of the cooling bath. A heater(132) is installed inside the heating bath of the coolant tank so that the heater heats the coolant exhausted from the cooler when the coolant goes over the isolation plate and is induced to the heating bath. A heater driving unit(130) supplies power to the heater. A pump drains and pumps the coolant of the heating bath for circulation of the coolant.
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