| 摘要 |
PURPOSE: To prevent irreversible deformation of a spacer when a large load is temporarily added from the outside by making an auxiliary spacer share the load. CONSTITUTION: Two or more kinds of spacers having different heights from the reference surface of the substrate are arranged so that a spacer for normal substrate gap holding and a spacer which functions only when large load is added are included. A pattern for level differences is previously formed to change the heights of the spacers.
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