| 摘要 |
In an optical linear encoder, light from an LED 2 passes through a moving grating 31 formed in a semiconductor moving plate 3 and is reflected by a reflective grating 41 of a reflective grating plate 4. An image of the reflective grating is detected by photodiodes 32 that are formed in the shape of a grid on the semiconductor moving plate 3. The moving grating 31 and the photodiodes 32 are formed on the same semiconductor substrate with the photodiodes 32 in the form of a grid having a lens effect. Consequently, a lens optical system is not required, making it possible to produce a compact, small-scale encoder. A differential signal for an A-phase signal obtained from a group of photodiodes arranged on the semiconductor substrate and an inverse of this signal is produced as the A-phase signal, and a differential signal for a B-phase signal and an inverse of this signal is produced as the B-phase signal, so that an encoder output with little error can be obtained.
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