SEMICONDUCTOR MANUFACTURING APPARATUS

摘要

A semiconductor manufacturing apparatus in this embodiment includes a reactor, a pump, an exhaust pipe and a mesh member. The reactor houses a semiconductor substrate to treat the semiconductor substrate. The pump exhausts a gas inside the reactor. The exhaust pipe connects between the reactor and the pump. The mesh member is located at a flow inlet of the pump for the gas or in the exhaust pipe and has a main plane having a plurality of meshes arranged thereon. The mesh member has a protrusion and/or protruding shape projecting upstream of the gas.

主权项

1. A semiconductor manufacturing apparatus comprising:
a reactor that houses a semiconductor substrate to treat the semiconductor substrate; a pump that exhausts a gas inside the reactor; an exhaust pipe that connects between the reactor and the pump; and a mesh member that is located at a flow inlet of the pump for the gas or in the exhaust pipe and has a main plane having a plurality of meshes arranged thereon, the mesh member having a protrusion and/or protruding shape projecting upstream of the gas.