| 发明名称 |
Surface micro-planarization for enhanced optical efficiency and pixel performance in SLM devices |
| 摘要 |
A method for enhancing the optical performance of a reflective spatial light modulator by micro-planarizing surfaces within the SLM, such as the reflective surface of each pixel, by gas-cluster-ion-beam bombardment.
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| 申请公布号 |
US2002075453(A1) |
申请公布日期 |
2002.06.20 |
| 申请号 |
US20010022884 |
申请日期 |
2001.12.17 |
| 申请人 |
STRUMPELL MARK H.;BAKER JAMES C.;GILLESPIE DAVID L. |
发明人 |
STRUMPELL MARK H.;BAKER JAMES C.;GILLESPIE DAVID L. |
| 分类号 |
G02B26/08;(IPC1-7):G03B21/26 |
主分类号 |
G02B26/08 |
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