发明名称 MANUFACTURE OF SILICA WAVEGUIDES WITH MINIMAL ABSORPTION
摘要 An improved high temperature chemical treatment of deposited silica films wherein they are subjected to a reactive ambient comprising hydrogen and oxygen atoms. This method results in better elimination of residual undesirable oscillators so as to provide improved optical quality silica waveguides with reduced optical absorption.
申请公布号 WO0248429(A1) 申请公布日期 2002.06.20
申请号 WO2001CA01753 申请日期 2001.12.06
申请人 ZARLINK SEMICONDUCTOR INC. 发明人 OUELLET, LUC;GRONDIN, MANUEL
分类号 C23C16/40;C23C16/56;G02B6/12;G02B6/132;(IPC1-7):C23C16/56 主分类号 C23C16/40
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