发明名称 |
FILTER SHEET AND PROCESS FOR PURIFYING PHOTORESIST COMPOSITION EMPLOYING THE FILTER SHEET |
摘要 |
A filter sheet is provided which comprises a self-supporting fibrous matrix having immobilized therein particulate filter aid and particulate ion exchange resin, wherein said particulate filter aid and particulate ion exchange resin are distributed substantially uniformly throughout a cross-section of said matrix. A process for removing inonic impurities from a photoresist solution is also provided which comprises passing the photoresist solution through said filter sheet to remove ionic impurities therefrom. |
申请公布号 |
WO0200325(A3) |
申请公布日期 |
2002.06.20 |
申请号 |
WO2001US41007 |
申请日期 |
2001.06.15 |
申请人 |
CUNO INCORPORATED |
发明人 |
HOU, KENNETH, C.;OSTREICHER, EUGENE, A.;SALE, RICHARD, D. |
分类号 |
B01D15/04;B01D39/00;B01D39/18;B01J20/28;B01J39/18;B01J47/00;B01J47/12 |
主分类号 |
B01D15/04 |
代理机构 |
|
代理人 |
|
主权项 |
|
地址 |
|