发明名称 APPARATUS FOR DETECTING THE WIDTH OF A V-GROOVE FORMED IN A SEMICONDUCTOR WAFER
摘要 The present invention generally relates to electrical detection of V-groove width during the fabrication of photosensitive chips, which create electrical signals from an original image, as would be found, for example, in a digital scanner or facsimile machine.
申请公布号 US2002074545(A1) 申请公布日期 2002.06.20
申请号 US20000736803 申请日期 2000.12.14
申请人 XEROX CORPORATION 发明人 HOSIER PAUL A.;BROWNE PAUL W.;TEWINKLE SCOTT L.
分类号 H01L21/66;H01L23/544;(IPC1-7):H01L23/58;H01L31/119;H01L31/113;H01L31/062;H01L29/94;H01L29/76 主分类号 H01L21/66
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