| 发明名称 |
SLIP RESISTANT HORIZONTAL SEMICONDUCTOR WAFER BOAT |
| 摘要 |
A horizontal wafer boat for maintaining semiconductor wafers during wafer processing is disclosed. The wafer boat is configured to reduce the likelihood wafer slip when wafers are heated to processing temperatures of about 1000 DEG C and above. |
| 申请公布号 |
WO0195374(A3) |
申请公布日期 |
2002.06.20 |
| 申请号 |
WO2001US17444 |
申请日期 |
2001.05.30 |
| 申请人 |
SAINT-GOBAIN CERAMICS AND PLASTICS, INC.;BUCKLEY, RICHARD, F. |
发明人 |
BUCKLEY, RICHARD, F. |
| 分类号 |
H01L21/683;H01L21/22;H01L21/324;H01L21/673 |
主分类号 |
H01L21/683 |
| 代理机构 |
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