Contact structure having silicon finger contactor

摘要

A contact structure for electrical connection with a contact target. The contact structure is formed of a contact substrate mounting a plurality of contactors. Each of the contactors is formed of a silicon base having inclined ends, a silicon beam formed on the silicon base having a support end and a contact end, and a conductive layer formed on a top surface of the silicon beam. The support end is slightly projected from the silicon base and the contact end is substantially projected from the silicon base. The contactor is mounted on the contact substrate such that the silicon base and the support end are connected to the surface of the contact substrate through an adhesive, thereby orienting the silicon beam in a predetermined diagonal direction.