| 摘要 |
<p>Double-supported beams (4, 4) are formed in a sheet shape of a material such as polyimide which can be formed in a sheet, and components are adhered to a movable part (3) of a cleflection part. The current to a flat coil (2) of the movable part (3) is applied via a floating wiring (20). A wiring in the beams may be omitted. The components adhered to the movable part (3) can be optical parts such as a reflecting mirror (31), a charge coupled device (12), a charge coupled device (12) including a lens (13), a MOS image pick-up device (14) including a lens (13), and a pyroelectric device (15).</p> |
