发明名称 Temperature compensation apparatus for thermally loaded bodies of low thermal conductivity
摘要 In a temperature compensation apparatus for thermally loaded bodies made from materials of low specific thermal conductivity, a heat-distributing device having one or more heat-distributing bodies is adapted to surfaces of the thermally loaded body such that there remains between the thermally loaded body and the heat-distributing bodies a gap which is filled with a fluid for the purpose of the thermal coupling of thermally loaded bodies and heat-distributing bodies in conjunction with mechanical decoupling.
申请公布号 US2002074115(A1) 申请公布日期 2002.06.20
申请号 US20010975920 申请日期 2001.10.10
申请人 DIEKER THOMAS 发明人 DIEKER THOMAS
分类号 G02B7/182;G02B7/18;G03F7/20;H01L21/02;H01L21/027;(IPC1-7):F27D19/00 主分类号 G02B7/182
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