| 发明名称 |
METHOD AND APPARATUS FOR INSPECTING A SUBSTRATE |
| 摘要 |
A method and apparatus for inspection and review of defects is disclosed wherein data gathering is improved. In one embodiment, multiple or segmented detectors are used in a particle beam system. |
| 申请公布号 |
WO0249080(A2) |
申请公布日期 |
2002.06.20 |
| 申请号 |
WO2001US48646 |
申请日期 |
2001.12.14 |
| 申请人 |
KLA TENCOR CORPORATION |
发明人 |
ADLER, DAVID, L.;BERTSCHE, KIRK;MCCORD, MARK;FRIEDMAN, STUART |
| 分类号 |
G01N21/956;G01N23/20;G01N23/225;G03F1/00;G03F7/20;H01J37/22;H01J37/28;H01L21/66 |
主分类号 |
G01N21/956 |
| 代理机构 |
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代理人 |
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| 主权项 |
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| 地址 |
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