发明名称 SYSTEM FOR PREVENTING IMPROPER INSERTION OF FOUP DOOR INTO FOUP
摘要 <p>An apparatus for preventing improper engagement of a pod door and a pod. Specifically, misalignment of at least one latch finger connected to the pod door with latch engagement slots in the pod prevents a pod door from mechanically engaging a pod.</p>
申请公布号 WO2002049079(A2) 申请公布日期 2002.06.20
申请号 US2001048513 申请日期 2001.12.11
申请人 发明人
分类号 主分类号
代理机构 代理人
主权项
地址