发明名称 |
APPARATUS FOR CONTROLLING JET SHAFT SELF-BRAKE OF VERTICAL DIFFUSION EQUIPMENT |
摘要 |
PURPOSE: An apparatus for controlling a jet shaft self-brake of vertical diffusion equipment is provided to control a self-brake by using a power source of a motor control portion. CONSTITUTION: A drive control portion(24) has a self-brake power circuit portion(22) connected with a non-contact relay(30). A motor control portion(32) has the non-contact relay(30) in order to control electric power applied to a self-brake(34). A jet shaft portion(21) is used for driving the motor control portion(32) according to a control operation of the drive control portion(24). The motor control portion is used for controlling an operation of a jet shaft motor(26) and maintaining a rotating state of the jet shaft(36) by applying the electric power to the self-brake(34). A transfer(38) is connected with a bearing.
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申请公布号 |
KR20020044911(A) |
申请公布日期 |
2002.06.19 |
申请号 |
KR20000074168 |
申请日期 |
2000.12.07 |
申请人 |
SAMSUNG ELECTRONICS CO., LTD. |
发明人 |
YOO, SANG CHEOL |
分类号 |
H01L21/22;(IPC1-7):H01L21/22 |
主分类号 |
H01L21/22 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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