发明名称 EXPENDABLE SUPPLIES CHANGING APPARATUS OF POLISHING EQUIPMENT
摘要 PURPOSE: An expendable supplies alternation apparatus of a polishing equipment is provided to reduce a changing time of expendable supplies and to improve a through-put by easily separating and reassembling the expendable supplies. CONSTITUTION: An expendable supplies alternation apparatus comprises a plate(30) having concave(30a) for holding diamond pellets(38), a staying shaft(32) protruded to the upper direction from the center of the plate(30) for supporting the lower portion of a dresser(40), a bearing(34) installed beneath the staying shaft(32) so as to perform an up and down movement through the circulation of the staying shaft(32), and a gear(36) connected to the lower portion of the staying shaft(32) for supplying a motive power. At this point, the dresser(40) is supported and moved by the staying shaft(32) using the motive power instead of a human power, thereby easily and stably separating an expendable supplies.
申请公布号 KR20020044637(A) 申请公布日期 2002.06.19
申请号 KR20000073626 申请日期 2000.12.06
申请人 SAMSUNG ELECTRONICS CO., LTD. 发明人 HONG, YONG SEONG
分类号 H01L21/304;(IPC1-7):H01L21/304 主分类号 H01L21/304
代理机构 代理人
主权项
地址