| 摘要 |
The geometric structure measuring device has an optical device (5), e.g. a camera, co-operating with a tactile sensor (1) having a sensor element (3) at the end of a shaft (2), which is deflected by contact with the object surface. The position variations of the sensor element or the shaft are detected by the optical device, which can move independently of the sensor. Also included are Independent claims for the following: (a) a method of releasing an adhered tactile sensor from a workpiece surface; (b) a method of cleaning a tactile sensor (c) miniature fiber-measuring calipers for use with the device |
